Utilize the technology accumulation of nearly 20 years in the MEMS field. He has a lot of design and process experience in sensors, biological MEMS, optical MEMS and radio frequency MEMS. The patterning process of micro-nano processing is mainly divided into two technologies: pattern transfer and direct processing. The pattern transfer technology includes three parts: thin film deposition, pattern imaging, and pattern transfer. The laser pointer beam etching technology of direct processing has direct writing capability. The avoiding multi-step process of pattern transfer, by controlling the focused high-energy laser (shortwave/pulse) beam to directly produce fine structures on the etching material. With micron/sub-micron film etching processing accuracy, it is suitable for a variety of materials. Realize the production of three-dimensional microstructures.
Micro-nano manufacturing technology refers to the millimeter scale. Micron and nano-scale parts. And the design, processing, assembly, integration and application technology of components or systems composed of these parts. Traditional "macro" machinery manufacturing technology can no longer meet the high-precision manufacturing and assembly processing requirements of these "micro" machinery and "micro" systems, and it is necessary to research and apply micro-nano manufacturing technologies and methods. Micro-nano manufacturing technology is the basic method and important foundation for the manufacturing of micro-sensors, micro-actuators, micro-structures and functional micro-nano systems. Micro-nano manufacturing includes two aspects: micro-manufacturing and nano-manufacturing. There are two different micro-manufacturing process methods for micro-manufacturing. One is photolithography technology, LIGA technology, bonding technology, packaging technology, etc. based on semiconductor manufacturing process. These process technology methods are relatively mature, but there are generally single processing materials and processing Problems such as expensive equipment, and can only process two-dimensional or quasi-three-dimensional micro-mechanical parts with simple structures, and cannot process complex three-dimensional micro-mechanical parts; the other is mechanical micro-machining, which refers to the use of mechanical processing, special processing and other Micro-processing technology formed by traditional processing technology such as forming technology. It can process three-dimensional complex surface parts. Processing materials are not limited, including micro grinding, micro turning, micro milling, micro drilling, micro stamping, micro forming, etc. Nano-manufacturing Nano-manufacturing refers to nano-scale structures with specific laser pointer functions. Manufacturing technology of devices and systems. Including nano-imprint technology, scribing technology, atomic manipulation technology, etc.